PaperIon beam patterning of block copolymer thin filmsRanulfo Allen, John Baglin, et al.J. Photopolym. Sci. Tech.
Conference paperSelf-assembling materials for lithographic patterning: Overview, status and moving forwardWilliam Hinsberg, Joy Cheng, et al.SPIE Advanced Lithography 2010
Conference paperX-ray lithography induced radiation effects in deep submicron CMOS devicesL.K. Wang, A. Acovic, et al.MRS Spring Meeting 1993