Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si

Paper

01 Jan 1985

Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

No abstract available.

Paper

D.D. Awschalom, J.-M. Halbout

Journal of Magnetism and Magnetic Materials

Conference paper

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

Paper

Hiroshi Ito, Reinhold Schwalm

JES

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R.D. Murphy, R.O. Watts

Journal of Low Temperature Physics