Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si

Paper

01 Jan 1985

Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

No abstract available.

Paper

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Physica B: Physics of Condensed Matter

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