Submicron YBa₂Cu₃O_7-δ grain boundary junction dc SQUIDs

We have fabricated and measured the properties of micron-size single grain boundary junctions and dc superconducting quantum interference devices (SQUIDs). The width of the junctions was varied between 0.25 and 2 μm. The junctions were formed in c-axis oriented epitaxial films with a single 24°tilt boundary. They were fabricated using electron beam lithography and ion milling. All of the junctions operate at 77 K. The noise properties of SQUIDs made of these junctions have been characterized. They show a significant 1/f component which is comparable to published values. However, the white noise level, 3×10-31 J/Hz measured at 77 K, is the lowest ever reported.