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SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
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Journal of Physics and Chemistry of Solids
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983