Top-surface-imaging resist for deep UV lithography
Scott A. MacDonald, H. Schlosser, et al.
International Technical Conference on Photopolymers 1991
The electrochemical and electrochromic properties of a variety of polysubstituted fluorene compounds have been studied. The 2,7- and 2,3-dimethoxy-, 2,3,6,7-tetramethoxy-, and 2,3,4,5,6,7-hexamethoxyfluorenes are highly reversible electrochromic materials. One-electron oxidation of these materials yields deeply colored, stable radical cations. The structure-property relationships observed for the electrochemical and absorption behavior of these materials are discussed. © 1980, American Chemical Society. All rights reserved.
Scott A. MacDonald, H. Schlosser, et al.
International Technical Conference on Photopolymers 1991
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
G.A. Corker, B. Grant, et al.
JES