William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A.c. and d.c. field effect experiments have been performed on etched n and p-type GaAs samples. On (111) surfaces of n-type GaAs, quasi-equilibrium measurements are possible at very low frequencies, and a surface conductance minimum can be observed. From this the existence of acceptor levels, to a large extent bulk states, can be concluded. From optical measurements three levels (1·09, 0·88, 0·73 eV) can be deduced at room temperature. A second quasi-equilibrium situation with much larger relative conductance changes exists at high frequencies (around 8 kc s) where the surface appears to be n-type. The slow bulk trapping has been investigated more directly with d.c. measurements, and results concerning trapping times and temperature dependences are presented. On p-type samples with (110) surfaces, evidence for slow surface states, which are ambientdependent, similar to those of Ge surfaces, has been found. © 1964.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Peter J. Price
Surface Science