C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
We have generated a model of hydrogenated amorphous silicon by first-principles molecular dynamics. Our results are in good agreement with the available experimental data and provide new insight into the microscopic structure of this material. The calculation lends support to models in which monohydride complexes are prevalent, and indicates a strong tendency of hydrogen to form small clusters. © 1991 The American Physical Society.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
J.C. Marinace
JES
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Proceedings of SPIE 1989
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures