Structure control in organic-inorganic hybrids using hyperbranched high-temperature polymers

Paper

01 Dec 1997

Abstract

No abstract available.

Conference paper

Kafai Lai, Alan E. Rosenbluth, et al.

SPIE Advanced Lithography 2007

Paper

R.M. Macfarlane, R.L. Cone

Physical Review B - CMMP

Paper

T.N. Morgan

Semiconductor Science and Technology

Paper

H.D. Dulman, R.H. Pantell, et al.

Physical Review B