Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ge 3 and Ge 4 are two high pressure crystal phases of germanium which have some of the structural features believed to be present in amorphous germanium. The atomic arrangements and electronic and optical properties of Ge 3 and Ge 4 are calculated. The properties of Ge 3 are found to show many similarities to those of amorphous germanium.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Stathis, R. Bolam, et al.
INFOS 2005
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011