Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Imran Nasim, Melanie Weber
SCML 2024
Ronald Troutman
Synthetic Metals