M. Hargrove, S.W. Crowder, et al.
IEDM 1998
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Frank Stem
C R C Critical Reviews in Solid State Sciences
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007