Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Peter J. Price
Surface Science
Hiroshi Ito, Reinhold Schwalm
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering