Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We study the ground-state properties of a particle moving in a tight-binding band and coupled to a Fermi sea of metal electrons. Using an effective Hamiltonian and a variational ground state, we find a band narrowing of Weff/W0 (W0/EF)±/1-±, where ± measures the coupling strength between particle and environment. A renormalization-group analysis gives the same result for ±<1 and an effective bandwidth Weff=0 for ±>1, indicating a (zero temperature) localization transition. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010