Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
The assumption of “perfect flexibility" is shown to be self-consistent in an important class of finite-width foil bearing problems. When the membrane equations are written in the “stretched coordinates" of foil bearing theory, the usual edge conditions on the tape result in a statically determinate problem. The tape dynamics couples to the Reynolds lubrication equation through a single force-balance equation which does not entail the elastic strain. © 1974 by ASME.
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
Mark W. Dowley
Solid State Communications