Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Combining dielectric, Brillouin, and neutron measurements, two spectral components related to freezing are identified in single crystals of Rb0.38(ND4)0.62D2PO4. The first corresponds to the incommensurate correlations that develop upon cooling and saturate near 80 K. These seem to be mostly static. A second, long-wave dynamic component continues to evolve markedly down to 30 K, developing a broad distribution of slow relaxations. The former may provide the hierarchy of constraints leading to the latter. © 1988 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
J.C. Marinace
JES
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering