Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A PS374-b-PFS45 copolymer self-assembles in thin films was shown to generate nanoscopic cylinders of PFS oriented normal to the surface in a PS matrix. Significantly, orientation normal to the substrate can be induced over a wide range of film thicknesses and is independent of the nature of the substrate surface. By cross-linking the PS matrix, a patterned array of PFS-derived iron-containing ceramic nanoparticles was produced. Thus, an important feature of this work was that nanopatterned surfaces can be very rapidly generated by simple spin- or dip-casting techniques.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Imran Nasim, Melanie Weber
SCML 2024
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta