A. Reisman, M. Berkenblit, et al.
JES
Relatively little is known about the epitaxial growth of alloys that are thermodynamically unstable. An analysis here suggests that spinodal decomposition can take place by formation of step bunches with alternating composition. This provides a possible mechanism for the spontaneous formation of superlattices during molecular beam epitaxy alloy growth. Kinetic effects reduce the degree of decomposition, relative to equilibrium. At sufficiently high growth rates, decomposition is completely suppressed. © 1997 The American Physical Society.
A. Reisman, M. Berkenblit, et al.
JES
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids