Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Relatively little is known about the epitaxial growth of alloys that are thermodynamically unstable. An analysis here suggests that spinodal decomposition can take place by formation of step bunches with alternating composition. This provides a possible mechanism for the spontaneous formation of superlattices during molecular beam epitaxy alloy growth. Kinetic effects reduce the degree of decomposition, relative to equilibrium. At sufficiently high growth rates, decomposition is completely suppressed. © 1997 The American Physical Society.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Frank Stem
C R C Critical Reviews in Solid State Sciences
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SPIE Advanced Lithography 2007
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