Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The options for electronic and vibrational spectroscopy of buried interfaces are investigated. It is shown how to combine the penetrating nature of photons with the breakdown of symmetry selection rules at an interface for penetrating many atomic layers, while still being able to detect the signal from a single interface layer. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Lawrence Suchow, Norman R. Stemple
JES