Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Specific heats of the alloys (YSe)0.8(TmSe)0.2 and (LaSe)0.9(TmSe)0.1 have been measured. A low temperature upturn in Y-based alloy is attributed to the appearance of magnetic order. The magnetic contribution increases above 16 K and is attributed to crystalline field effect. A bump, similar to that of TmTe is observed. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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EMC 2011
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Physics of Fluids