Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lattice defects in a metal modify the conduction-band carrier density at the defect site. Thus transport, past the scattering caused by thermal lattice vibrations, becomes easier (or harder) in the region of changed carrier density. The resulting transport field inhomogeneities have been discussed in earlier work on electromigration. This paper discusses the effect on the electronic resistivity. © 1976 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ellen J. Yoffa, David Adler
Physical Review B
J.A. Barker, D. Henderson, et al.
Molecular Physics
Hiroshi Ito, Reinhold Schwalm
JES