Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We explicitly obtain, for K(x, y) totally positive, a best choice of functions u1, ..., un and v1, ..., vn for the problem minui, vi (∝01 (∝01 |K(x, y) - ∑i = 1, n ui(x) vi(y)| dyp dx) 1 p, where ui ε{lunate} Lp[0, 1], vi ε{lunate} L1[0, 1], i = 1, ..., n, and p ε{lunate} [1, ∞]. We show that an optimal choice is determined by certain sections K(x, ξ1), ..., K(x, ξn), and K(τ1, y), ..., K(τn, y) of the kernel K. We also determine the n-widths, both in the sense of Kolmogorov and of Gel'fand, and identify optimal subspaces, for the set Kr,v = {f(x) = ∑ i=1 raiki(x) + ∫ 0 1K(x,y)h(y)dy, (a1, ..., ar)ε{lunate}Rr, {norm of matrix}h{norm of matrix}p≤1}, as a subset of Lq[0, 1], with either p = ∞ and q ε{lunate} [1, ∞], or p ε{lunate} [1, ∞] and q = 1, where {k1(x), ..., kr(x), K(x, y)} satisfy certain restrictions. A particular example is the ball Br,v = {f} in the Sobolev space. © 1978.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications