Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper first describes a theory and algorithms for asymptotic integer programs. Next, a class of polyhedra is introduced. The vertices of these polyhedra provide solutions to the asymptotic integer programming problem; their faces are cutting planes for the general integer programming problem and, to some extent, the polyhedra coincide with the convex hull of the integer points satisfying a linear programming problem. These polyhedra are next shown to be cross sections of more symmetric higher dimensional polyhedra whose properties are then studied. Some algorithms for integer programming, based on a knowledge of the polyhedra, are outlined. © 1969.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shu Tezuka
WSC 1991
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
L Auslander, E Feig, et al.
Advances in Applied Mathematics