William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994