Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This paper presents an algorithm to obtain near optimal solutions for the Steiner tree problem in graphs. It is based on a Lagrangian relaxation of a multi-commodity flow formulation of the problem. An extension of the subgradient algorithm, the volume algorithm, has been used to obtain lower bounds and to estimate primal solutions. It was possible to solve several difficult instances from the literature to proven optimality without branching. Computational results are reported for problems drawn from the SteinLib library.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Naga Ayachitula, Melissa Buco, et al.
SCC 2007