SOI slot photonic crystal cavities on SiO₂ from λ = 1.3 μm to 1.6 μm

Slot photonic crystal cavities are of great interest for their advantages of small footprint as well as pretty high quality factors and large (Q/V) factors. A series of slot photonic crystal heterostructure cavities with resonant wavelengths in the range 1.3 μm-1.6 μm has been designed and fabricated with Q of tens of 10000 and (Q/V) reaching 800 000. These works open perspectives for on-chip nonlinear optics and biosensing.