Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Knowledge of the contact stress state in layered media is important for quantitative understanding of the mechanical reliability of the media. The two-dimensional quasi-static stress analysis of a layer on an elastic half-space under combined normal and sliding cylindrical contact is studied. Results are presented for the stresses in both the layer and half-space and contrasted with the case of a homogeneous medium. © 1987.