J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
No abstract available.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings