Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Given an irreducible algebraic curve f(x,y)=0 of degree n≥3 with rational coefficients,we describe algorithms for determinig whether the curve is singular, and if so, isolating its singular points, computing their multiplicities, and counting the number of distinct tangents at each. The algorithms require only rational arithmetic operations on the coefficients of f(x,y)=0, and avoid the need for more abstract symbolic representations of the singular point coordinates. © 1990, Academic Press Limited. All rights reserved.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
L Auslander, E Feig, et al.
Advances in Applied Mathematics
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011