Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present a simple algorithm for approximating all roots of a polynomial p(x) when it has only real roots. The algorithm is based on some interesting properties of the polynomials appearing in the Extended Euclidean Scheme for p(x) and p′(x). For example, it turns out that these polynomials are orthogonal; as a consequence, we are able to limit the precision required by our algorithm in intermediate steps. A parallel implementation of this algorithm yields a P-uniform NC2 circuit, and the bit complexity of its sequential implementation is within a polylog factor of the bit complexity of the best known algorithm for the problem. © 1990.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Nimrod Megiddo
Journal of Symbolic Computation
Shu Tezuka
WSC 1991
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007