Accounts of Chemical Research

Paper

01 May 2002

Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry

View publication

Abstract

No abstract available.

Paper

Fourth overtone spectra of OH oscillators in simple alcohols

Joseph M. Jasinski

Chemical Physics Letters

Paper

Surface chemistry in the chemical vapor deposition of electronic materials

Stephen M. Gates

Chemical Reviews

Paper

Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects

E. T. Todd Ryan, Stephen M. Gates, et al.

Journal of Applied Physics

Paper

Corrosion in low dielectric constant Si-O based thin films: Buffer concentration effects

F.W. Zeng, Stephen M. Gates, et al.

AIP Advances

View all publications