E. Todd Ryan, Stephen M. Gates, et al.
Journal of Applied Physics
Paper
Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry
Abstract
No abstract available.
Related
Joseph M. Jasinski
Chemical Physics Letters
E. T. Todd Ryan, Stephen M. Gates, et al.
Journal of Applied Physics
Jack O. Chu, David B. Beach, et al.
Journal of Physical Chemistry