Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
No abstract available.
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Charles A Micchelli
Journal of Approximation Theory
Shu Tezuka
WSC 1991
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003