Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider the problem of determining when a given source can be used to approximate the output due to any input to a given channel. We provide achievability and converse results for a general source and channel. For the special case of a full-rank discrete memoryless channel we give a stronger converse result than we can give for a general channel.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.F. Cowlishaw
IBM Systems Journal
Thomas R. Puzak, A. Hartstein, et al.
CF 2007
Robert C. Durbeck
IEEE TACON