Self-organized quantum-wire lattice via step flow growth of a short-period superlattice

A theoretical model for step flow growth of multilayer films was investigated taking into account the interlayer step-step interaction induced by misfit strain. The model is used to simulate the growth of strain-compensated short-period superlattices. The improvement of step-bunch ordering in successive layers leads to self-organized growth of a lattice of quantum wires. The method is useful for fabricating quantum-wire superlattice and also effectively avoids dislocation formation.