William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry