G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
This article focuses on recent scanning tunnelling microscopy studies that have led to an improved understanding of the interaction of hydrogen with silicon surfaces. The structure and bonding of the Si(111)-7 * 7 and Si(100)-2 * 1 surfaces are described together with the adsorption and desorption of hydrogen from these surfaces. The role of hydrogen in the passivation of silicon surfaces and silicon chemical vapour deposition are also discussed. © Taylor & Francis Group, LLC.
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Frank Stem
C R C Critical Reviews in Solid State Sciences
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008