Y. Watanabe, J.G. Bednorz, et al.
Applied Physics Letters
Paper
Scanning tunneling microscope combined with a scanning electron microscope
Abstract
We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.
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