Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In "Monadic Computation and Iterative Algebraic Theories" Elgot [3] introduced the notion of a vector iterative theory and showed that vector iterative theories have a close connection with several aspects of the theory of computation. In private conversations Elgot formulated the notion of a scalar iterative theory and raised the question whether scalar and vector iterative theories coincide. We answer this question in the affirmative. © 1977 Academic Press, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998