Conference paper
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
No abstract available.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
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Journal of Applied Physics
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Applied Physics Letters
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Proceedings of the IEEE