A. Reisman, M. Berkenblit, et al.
JES
No abstract available.
A. Reisman, M. Berkenblit, et al.
JES
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Robert W. Keyes
Physical Review B