J.H. Stathis, R. Bolam, et al.
INFOS 2005
No abstract available.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films