Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A perfluorinated (or semi-perfluorinated) chain is affixed to various classical mesogenic moieties in lieu of the usual hydrocarbon tail. The consequences of this modification on the mesogenic behaviour are discussed by comparison with the perhydrogenated homologues. Smectic A phases are highly favoured. Their layer spacings show a trend to bilayer stacking in many cases likely to result from microsegregation among incompatible portions of the molecules. © 1991 Taylor & Francis Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Technical Digest-International Electron Devices Meeting
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