Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Charles A Micchelli
Journal of Approximation Theory