Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Tunable ultraviolet laser spectroscopy is used to investigate the short wavelength fluorescence of Nd3+ in four fluoride crystals. The fluorescence intensities and lifetimes are compared suggesting a relation between the coordination number of the rare earth ions and the relaxation properties of the high lying states. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
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Digital Discovery