Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Evaporated Co1-xPtx and Co1-xPdx alloy films with an average perpendicular magnetic anisotropy constant Ku of up to 0.5 MJ/m3 have been investigated. A functional relationship between Ku and the Kerr rotation contributions ΔΘKPt,Pd arising from exchange polarized Pt and Pd, respectively, could be established. Our results suggest important contributions to the anisotropy from Pt-5d and Pd-4d states via electronic hybridization with Co-3d states. An anisotropy model based on growth induced heterogeneities in these alloys is proposed. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011