William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
One of the key issues related to studies in microscale heat transfer is the ability to measure temperature at small scales. In the recent past, rapid and significant progress has enabled temperature measurements to be made with unprecedented high spatial and temporal resolutions. This has allowed heat transfer research to enter a new regime which was previously inaccessible. This article reviews recent developments and discusses future directions, indicating the variety of opportunities for research that are of scientific and technological importance.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T.N. Morgan
Semiconductor Science and Technology
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INFORMS 2021
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS