Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Paper
Recent developments in instrumentation in ellipsometry
Abstract
The present status of ellipsometric measurement capability is reviewed. Significant advances since the last ellipsometry conference are highlighted. © 1980.
Related
A. Reisman, M. Berkenblit, et al.
JES
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering