Conference paper
90 nm SiCOH technology in 300 mm manufacturing
L. Clevenger, M. Yoon, et al.
ADMETA 2004
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
L. Clevenger, M. Yoon, et al.
ADMETA 2004
R. Augur, C. Child, et al.
Microelectronic Engineering
C.-C. Yang, F. Baumann, et al.
IITC/MAM 2011
C.-C. Yang, T.M. Shaw, et al.
Electrochemical and Solid-State Letters