Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using photocurrent spectroscopy, we have demonstrated that the quantum coherence in GaAs-Ga1-xAlxAs superlattices increases with decreasing superlattice period D, and that it is maintained for at least eight periods when D=60 A. The coherence length was determined from the number of observed interband transitions between the valence- and conduction-band Stark ladders, formed when an electric field was applied along the superlattice direction. As an additional manifestation of the Stark ladder, the photocurrent showed strong oscillations, periodic in the reciprocal of the electric field, which gave rise to regions of pronounced negative differential resistance. © 1989 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T. Schneider, E. Stoll
Physical Review B
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Peter J. Price
Surface Science