R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
Pre-silieon yield estimators for ASIC products have the potential for improved accuracy based on retrospective critical area and yield analysis of completed designs. A prototype closed-loop system, in which a database of observed yield and computed critical areas is continuously compiled and updated, is described in this paper. The database allows a yield model based on circuit content, which is available at the time of quote, but before the physical layout, to be optimized to more accurately reflect a technology's random defect sensitivities. Confining one's observations to the mature 130-nm technology minimizes the inclusion of systematic defects in the observed yield and allows for a more complete view of the random defect component of yield loss. © 2008 IEEE.
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
R. Ghez, J.S. Lew
Journal of Crystal Growth
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B