E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Paper
Probe-based 3-D nanolithography using self-amplified depolymerization polymers
Abstract
Figure Presented 3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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