Conference paperSystematic study of workfunction engineering and scavenging effect using NiSi alloy FUSI metal gates with advanced gate stacksY.-H. Kim, C. Cabral Jr., et al.IEDM 2005
Conference paperHigh performance and highly uniform gate-all-around silicon nanowire MOSFETs with wire size dependent scalingS. Bangsaruntip, G.M. Cohen, et al.IEDM 2009
Conference paperIn situ TEM analysis of TiSi2 C49-C54 transformations during annealingL. Gignac, V. Svilan, et al.MRS Fall Meeting 1996